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    FloTron

    FloTron? systems use ‘sensors’ and ‘actuators’ to monitor and control accurately plasmabased
    Physical Vapour Deposition (PVD) and Chemical Vapour Deposition (CVD) processes.
    They are especially useful for controlling Reactive Magnetron Sputtering processes for
    deposition of oxide, nitride and oxy-nitride layers.

     

    Figure 1.  Basic FloTronTM system configuration in a small reactive sputtering system.

     

     

    Figure 2.  Typical FloTronTM system configuration in large area 3-zone dual reactive magnetron sputtering process chamber.

     

     

     

     

    Products

    ContactUs

    Zip Code: 518000

    Linkman: Shiyuan Zhu

    Tellephone: 0755-61508003

    Fax: 0755-61508006

    Mobile Phone: 13502824989

    Email: zhsy313@163.com

    ContactUs
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